Section 1: Product Identification
Tetrakis(ethylmethylamino)zirconium(IV), 99% TEMAZ, 40-1710, contained in 50 ml Swagelok® cylinder
Chemical Name:
(96-1070) for CVD/ALD
CAS Registry Number: 175923-04-3
Formula: Zr[N(CH3)(CH2CH3)]4
EINECS Number: none
Chemical Family: metal amide complex
Synonym: Zirconium(IV) ethylmethylamide; Zirconium-tetrakis-ethylmethylamide
Section 2: Composition and Information on Ingredients
Ingredient CAS Number Percent ACGIH (TWA) OSHA (PEL)
Title compound 175923-04-3 100% 5mg/m3 (as Zr) 5mg/m3 (as Zr)
Section 3: Hazards Identification
Emergency Overview: Material is extremely irritating to skin, eyes and respiratory tract.
Primary Routes of Exposure: Ingestion, inhalation of dust and vapor
Eye Contact: Causes severe irritation to the eyes.
Skin Contact: Causes severe irritation to the skin.
Inhalation: Causes irritation to the nose, mucous membranes and respiratory tract.
Ingestion may lead to burning sensation, dizziness, abdominal cramps, vomiting, bloody diarrhea, weakness
Ingestion:
and convulsions.
Acute Health Affects: Causes severe irritation to the skin, eyes and respiratory tract. May be harmful if swallowed or inhaled.
No information on long-term chronic effects. Repeated or prolonged exposure of the skin may cause
Chronic Health Affects:
dermatitis.
NTP: No
IARC: No
OSHA: No
SECTION 4: First Aid Measures
Immediately flush the eyes with copious amounts of water for at least 10-15 minutes. A victim may need
Eye Exposure:
assistance in keeping their eye lids open. Get immediate medical attention.
Wash the affected area with water. Remove contaminated clothes if necessary. Seek medical assistance if
Skin Exposure:
irritation persists.
Remove the victim to fresh air. Closely monitor the victim for signs of respiratory problems, such as difficulty
Inhalation:
in breathing, coughing, wheezing, or pain. In such cases seek immediate medical assistance.
Seek medical attention immediately. Keep the victim calm. Give the victim water (only if conscious). Induce
Ingestion:
vomiting only if directed by medical personnel.
SECTION 5: Fire Fighting Measures
Flash Point: no data
Autoignition Temperature: no data
Explosion Limits: no data
Extinguishing Medium: carbon dioxide, foam or dry powder
If this product is involved in a fire, fire fighters should be equipped with a NIOSH approved positive pressure
Special Fire Fighting Procedures:
self-contained breathing apparatus and full protective clothing.
Hazardous Combustion and If involved in a fire, this material may emit toxic and corrosive fumes.
Decomposion Products:
Unusual Fire or Explosion Hazards: Highly flammable. Releases flammable gas in contact with water.
SECTION 6: Accidental Release Measures
Eliminate all ignition sources and ensure adequate ventilation. Small spills can be mixed with vermiculite,
Spill and Leak Procedures:
sodium carbonate or other suitable non-combustible adsorbent and swept up.
SECTION 7: Handling and Storage
Store the material in a tightly sealed container under an inert atmosphere of nitrogen or argon. Keep away
Handling and Storage:
from heat and direct sunlight.
SECTION 8: Exposure Controls and Personal Protection
Eye Protection: Always wear approved safety glasses when handling a chemical substance in the laboratory.
Skin Protection: Wear protective clothing and gloves.
Ventilation: Handle the material in an efficient fume hood.
If ventilation is not available a respirator should be worn. The use of respirators requires a Respirator
Respirator:
Protection Program to be in compliance with 29 CFR 1910.134.
Ventilation: Handle the material in an efficient fume hood.
Additional Protection: No additional protection required.
SECTION 9: Physical and Chemical Properties
Color and Form: light yellow liq.
Molecular Weight: 323.63
Melting Point: not applicable
Boiling Point: 81°C /0.1mm
Vapor Pressure: no data
Specific Gravity: 1.049
Odor: slight amine odor
Solubility in Water: reacts with water
SECTION 10: Stability and Reactivity
Stability: moisture sensitive
Hazardous Polymerization: no hazardous polymerization
Conditions to Avoid: contact with water
Incompatibility: Water, mineral acids, halogens and oxidizing agents
Decomposition Products: Carbon dioxide, carbon monoxide, organic fumes and zirconium oxide.
SECTION 11: Toxicological Information
RTECS Data: No information available from the RTECS files.
Carcinogenic Effects: no data
Mutagenic Effects: no data
Tetratogenic Effects: no data
SECTION 12: Ecological Information
Ecological Information: No information available.
SECTION 13: Disposal Considerations
Disposal: Dispose of this material according to local, state and federal regulations.
SECTION 14: Transportation
Shipping Name (CFR): Organometallic substance, Liquid, Water-reactive,Flammable
Hazard Class (CFR): 4.3
Additional Hazard Class (CFR): 3
Packaging Group (CFR): II
UN ID Number (CFR): UN# 3399
Shipping Name (IATA): Organometallic substance, Liquid,Water-reactive,Flammable
Hazard Class (IATA): 4.3
Additional Hazard Class (IATA): 3
Packaging Group (IATA): II
UN ID Number (IATA): UN# 3399
SECTION 15: Regulatory Information
TSCA: Not listed in the TSCA inventory
SARA (Title 313): Title compound not listed
Second Ingredient: none
SECTION 16 - ADDITIONAL INFORMATION
N/A
F
Xi
F
Xi
