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Section 1: Product Identification
   Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH,PURATREM,72-8000,contained in
   Chemical Name:
   50ml Swagelok® cylinder (96-1070) for CVD/ALD
   CAS Registry Number:       19962-11-9    
   Formula:       Hf(N(CH3)2)4    
   EINECS Number:       none    
   Chemical Family:       metal amide complex    
   Synonym:       none    

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Section 2: Composition and Information on Ingredients
   Ingredient       CAS Number       Percent       ACGIH (TWA)       OSHA (PEL)    
   Title Compound       19962-11-9       100%       no data       no data    

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Section 3: Hazards Identification
   Emergency Overview:       Corrosive to eyes, skin and respiratory tract.    
   Primary Routes of Exposure:       Ingestion, inhalation, skin, eyes    
   Eye Contact:       Causes burns to the eyes    
   Skin Contact:       Causes burns to the skin.    
   Inhalation:       Causes burns to the nose, mucous membranes and respiratory tract.    
   Ingestion:       No information on the physiological effects of ingestion.    
   Acute Health Affects:       Corrosive to skin, eyes and respiratory tract.    
   Chronic Health Affects:       No information available on long-term chronic effects.    
   NTP:       No    
   IARC:       No    
   OSHA:       No    

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SECTION 4: First Aid Measures
   Immediately flush the eyes with copious amounts of water for at least 10-15 minutes. A victim may need
   Eye Exposure:
   assistance in keeping their eye lids open. Get immediate medical attention.
   Wash the affected area with water. Remove contaminated clothes if necessary. Seek medical assistance if
   Skin Exposure:
   irritation persists.
   Remove the victim to fresh air. Closely monitor the victim for signs of respiratory problems, such as difficulty
   Inhalation:
   in breathing, coughing, wheezing, or pain. In such cases seek immediate medical assistance.
   Seek medical attention immediately. Keep the victim calm. Give the victim water (only if conscious). Induce
   Ingestion:
   vomiting only if directed by medical personnel.

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SECTION 5: Fire Fighting Measures
   Flash Point:       none    
   Autoignition Temperature:       no data    
   Explosion Limits:       no data    
   Extinguishing Medium:       carbon dioxide, foam or dry powder    
   If this product is involved in a fire, fire fighters should be equipped with a NIOSH approved positive pressure
   Special Fire Fighting Procedures:
   self-contained breathing apparatus and full protective clothing.
   Hazardous Combustion and       If involved in a fire, this material may emit irritating organic fumes.    
   Decomposion Products:
   Unusual Fire or Explosion Hazards: No unusual fire or explosion hazards.

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SECTION 6: Accidental Release Measures
   Spill and Leak Procedures:       Small spills can be absorbed into vermiculite or other suitable adsorbent. Sweep up the solid and dispose of.    

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SECTION 7: Handling and Storage
   Store cold, in freezer, in a tightly sealed container. Keep away from heat and direct sunlight. Handle and store
   Handling and Storage:
   under an inert atmosphere of nitrogen or argon.

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SECTION 8: Exposure Controls and Personal Protection
   Eye Protection:       Always wear approved safety glasses when handling a chemical substance in the laboratory.    
   Skin Protection:       Wear protective clothing and gloves.    
   Ventilation:       Handle the material in an efficient fume hood.    
   If ventilation is not available a respirator should be worn. The use of respirators requires a Respirator
   Respirator:
   Protection Program to be in compliance with 29 CFR 1910.134.
   Ventilation:       Handle the material in an efficient fume hood.    
   Additional Protection:       No additional protection required.    

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SECTION 9: Physical and Chemical Properties
   Color and Form:       colorless to pale yellow xtl    
   Molecular Weight:       354.79    
   Melting Point:       38-41°    
   Boiling Point:       85°C /0.1mm    
   Vapor Pressure:       0.1mm/60?    
   Specific Gravity:       no data    
   Odor:       slight amine odor    
   Solubility in Water:       reacts violently with water    

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SECTION 10: Stability and Reactivity
   Stability:       moisture sensitive (store cold)    
   Hazardous Polymerization:       no hazardous polymerization    
   Conditions to Avoid:       contact with water    
   Incompatibility:       strong oxidizing agents, water, halogens    
   Decomposition Products:       Carbon dioxide, carbon monoxide, organic fumes and hafnium oxide.    

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SECTION 11: Toxicological Information
   RTECS Data:       No information available from the RTECS files.    
   Carcinogenic Effects:       no data    
   Mutagenic Effects:       no data    
   Tetratogenic Effects:       no data    

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SECTION 12: Ecological Information
   Ecological Information:       No information available.    

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SECTION 13: Disposal Considerations
   Disposal:       Dispose of this material according to local, state and federal regulations.    

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SECTION 14: Transportation
   Shipping Name (CFR):       Water-reactive solid, Corrosive, N.O.S.    
   Hazard Class (CFR):       4.3    
   Additional Hazard Class (CFR):       8    
   Packaging Group (CFR):       II    
   UN ID Number (CFR):       UN# 3131    
   Shipping Name (IATA):       Water-reactive solid, Corrosive, N.O.S.    
   Hazard Class (IATA):       4.3    
   Additional Hazard Class (IATA):       8    
   Packaging Group (IATA):       II    
   UN ID Number (IATA):       UN# 3131    

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SECTION 15: Regulatory Information
   TSCA:       Not listed in the TSCA inventory    
   SARA (Title 313):       Not reportable under SARA Title 313.    
   Second Ingredient:       none    

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SECTION 16 - ADDITIONAL INFORMATION
N/A