Section 1: Product Identification
Chemical Name: Nonamethyltrisilazane, 98%
CAS Registry Number: 1586-73-8
Formula: N[Si(CH3)3]3
EINECS Number: 216-445-0
Chemical Family: organosilicon compound
Synonym: Tris(trimethylsilyl)amine
Section 2: Composition and Information on Ingredients
Ingredient CAS Number Percent ACGIH (TWA) OSHA (PEL)
Title Compound 1586-73-8 100% no data no data
Section 3: Hazards Identification
Irritating to skin, eyes and respiratory tract. Slowly generates ammonia gas in the presence of moisture.
Emergency Overview:
Symptoms are choking, wheezing, laryngitis, headache, nausea and vomiting.
Primary Routes of Exposure: Ingestion, inhalation, skin, eyes.
Eye Contact: Irritating to the eyes. May cause burns.
Skin Contact: Irritating to skin. May be harmful if absorbed through the skin.
Inhalation causes irritation of the respiratory tract. May cause edema and chemical pneumonitis. Inhalation
Inhalation:
may be fatal.
Ingestion: May cause nausea, vomiting and gastrointestinal tract burns, perforation and peritonitis, with abdominal pain.
Irritating to skin, eyes and respiratory tract. Ingestion may cause damage to the mouth, throat, esophagus and
Acute Health Affects:
gastrointestinal tract. Inhalation may be fatal due to edema and chemical pneumonitis.
Chronic Health Affects: No information available on long-term chronic effects.
NTP: No
IARC: No
OSHA: No
SECTION 4: First Aid Measures
Immediately flush the eyes with copious amounts of water for at least 10-15 minutes. A victim may need
Eye Exposure:
assistance in keeping their eye lids open. Get immediate medical attention.
Wash the affected area with water. Remove contaminated clothes if necessary. Seek medical assistance if
Skin Exposure:
irritation persists.
Remove the victim to fresh air. Closely monitor the victim for signs of respiratory problems, such as difficulty
Inhalation:
in breathing, coughing, wheezing, or pain. In such cases seek immediate medical assistance.
Seek medical attention immediately. Keep the victim calm. Give the victim water (only if conscious). Induce
Ingestion:
vomiting only if directed by medical personnel.
SECTION 5: Fire Fighting Measures
Flash Point: not applicable
Autoignition Temperature: no data
Explosion Limits: no data
Extinguishing Medium: carbon dioxide or dry powder
Fire fighters should be equipped with a NIOSH approved positive pressure self-contained breathing apparatus
Special Fire Fighting Procedures:
and full protective clothing.
Hazardous Combustion and If involved in a fire, this material may emit toxic and corrosive fumes.
Decomposion Products:
Unusual Fire or Explosion Hazards: No unusual fire or explosion hazards.
SECTION 6: Accidental Release Measures
Spill and Leak Procedures: Sweep up the solid and dispose of properly.
SECTION 7: Handling and Storage
Handling and Storage: Store the material in a sealed container. Keep away from heat and moisture.
SECTION 8: Exposure Controls and Personal Protection
Eye Protection: Always wear approved safety glasses when handling a chemical substance in the laboratory.
Skin Protection: Wear protective clothing and gloves. Consult with glove manufacturer to determine the proper type of glove.
Ventilation: Handle the material in an efficient fume hood.
If ventilation is not available a respirator should be worn. The use of respirators requires a Respirator
Respirator:
Protection Program to be in compliance with 29 CFR 1910.134.
Ventilation: Handle the material in an efficient fume hood.
Additional Protection: No additional protection required.
SECTION 9: Physical and Chemical Properties
Color and Form: white to colorless waxy solid
Molecular Weight: 233.6
Melting Point: 70-71°
Boiling Point: 76°C /12 mm
Vapor Pressure: no data
Specific Gravity: 0.8635
Odor: ammonia odor
Solubility in Water: insoluble
SECTION 10: Stability and Reactivity
Stability: air and moisture stable
Hazardous Polymerization: no hazardous polymerization
Conditions to Avoid: contact with moisture
Incompatibility: acids, oxidizing agents and halogens
Decomposition Products: carbon dioxide, carbon monoxide, silicon dioxide, nitrogen oxides and organic fumes.
SECTION 11: Toxicological Information
RTECS Data: No information available in the RTECS files.
Carcinogenic Effects: No data available
Mutagenic Effects: No data available
Tetratogenic Effects: No data available
SECTION 12: Ecological Information
Ecological Information: No information available
SECTION 13: Disposal Considerations
Disposal: Dispose of according to federal, state, and local regulations.
SECTION 14: Transportation
Shipping Name (CFR): Non-hazardous
Hazard Class (CFR): NA
Additional Hazard Class (CFR): NA
Packaging Group (CFR): NA
UN ID Number (CFR): NA
Shipping Name (IATA): Non-hazardous
Hazard Class (IATA): NA
Additional Hazard Class (IATA): NA
Packaging Group (IATA): NA
UN ID Number (IATA): NA
SECTION 15: Regulatory Information
TSCA: Listed in the TSCA inventory.
SARA (Title 313): Title compound not listed.
Second Ingredient: none
SECTION 16 - ADDITIONAL INFORMATION
N/A
