Al

Au

Cr

Cu

Ni

Si

Si₃N₄

SiO₂

Ti

W

GaAs

Ta/TaN

铝  A

etch

ok

etch

etch

etch

surf ox

slight

ok

ok

ok

etch

surf ox

铝  D

etch

ok

slight

ok

ok

ok

slight

ok

ok

ok

ok

ok

铬蚀刻剂

1020

etch

ok

etch

etch

etch

surf ox

ok

ok

ok

ok

etch

surf ox

铬蚀刻剂

1020 CRE-473

etch

ok

etch

ok

slight

ok

ok

ok

etch

ok

etch

ok

铬蚀刻剂

TFD

etch

ok

etch

etch

etch

surf ox

ok

ok

ok

ok

etch

surf ox

铜蚀刻剂

100

etch

ok

slight

etch

etch

ok

ok

ok

slight

ok

etch

ok

铜蚀刻剂

200

etch

ok

slight

etch

etch

ok

ok

ok

slight

ok

etch

ok

铜蚀刻剂

APS-100

ok

ok

ok

etch

slight

ok

ok

ok

ok

ok

ok

GE-8110

etch

etch

ok

corrode

ok

ok

ok

ok

ok

ok

etch

ok

GE-8111

etch

etch

ok

corrode

ok

ok

slight

ok

ok

ok

etch

ok

GE-8148

etch

etch

ok

corrode

ok

ok

ok

ok

ok

ok

etch

ok

金蚀刻剂

TFA

etch

etch

ok

corrode

slight

ok

ok

ok

ok

ok

etch

ok

镍铬蚀刻剂

TFC

etch

ok

etch

etch

etch

surf ox

ok

ok

ok

ok

etch

surf ox

镍铬蚀刻剂

TFN

etch

ok

etch

etch

etch

surf ox

ok

ok

ok

ok

etch

surf ox

镍蚀刻剂

TFB

etch

ok

etch

etch

etch

surf ox

ok

ok

ok

ok

etch

surf ox

镍蚀刻剂

TFG

etch

ok

ok

ok

etch

ok

ok

ok

ok

ok

ok

ok

镍蚀刻剂

1型

etch

ok

slight

etch

etch

ok

ok

ok

slight

ok

etch

ok

银蚀刻剂

TFS

etch

etch

ok

corrode

slight

ok

ok

ok

ok

ok

etch

ok

氮化钽

蚀刻剂 Ⅲ

etch

ok

etch

etch

etch

etch

ok

etch

etch

ok

etch

etch

氮化钽蚀刻剂

SIE-8607

etch

ok

etch

etch

etch

etch

ok

etch

etch

ok

etch

etch

钛蚀刻剂

TFT

etch

ok

etch

ok

ok

ok

etch

etch

etch

ok

etch

ok

钛蚀刻剂

TFTN

etch

ok

etch

slight

slight

ok

ok

ok

etch

ok

etch

ok

钛－钨

TiW-30

ok

ok

ok

ok

slight

ok

ok

ok

ok

ok

ok

钨蚀刻剂

TFW

etch

etch

etch

ok

etch

slight

ok

slight

ok

etch

etch

ok